Continuous-time interface for a micromachined capacitive accelerometer with NEA of 4 g and bandwidth of 300 Hz

AN INTEGRATED SURFACE MICROMACHINED CAPACITIVE LATERAL ACCELEROMETER WITH 2μG/√Hz RESOLUTION

A capacitive position measurement interface minimizes noise from parasitics in the electromechanical interface and uses correlated double sampling to achieve better than 10Å/√Hz displacement resolution. This translates into 2μG/√Hz acceleration resolution when the device is operated in a vacuum.

A Micropower -Based Interface ASIC for a Capacitive 3-Axis Micro-Accelerometer

In this paper, a micropower interface IC for a capacitive 3-axis micro-accelerometer is presented. The IC is implemented in a 0.25m CMOS process. The fully-integrated sensor interface is based on a sensor front-end that operates mechanically in an open-loop configuration and converts the acceleration signals directly into the digital domain, thus avoiding the use of separate analog-to-digital c...

High-resolution continuous-time interface for micromachined capacitive accelerometer

A Post-CMOS Micromachined Lateral Accelerometer

In a post-complementary metal–oxide–semiconductor (CMOS) micromachining technology, the process flow enables the integration of micromechanical structures with conventional CMOS circuits which are low-cost and readily available. This paper presents a lateral capacitive sensing accelerometer fabricated in the post-CMOS process. Design advantages include electrically isolated multimetal routing o...

High-Sensitivity Encoder-Like Micro Area-Changed Capacitive Transducer for a Nano-g Micro Accelerometer

Encoder-like micro area-changed capacitive transducers are advantageous in terms of their better linearity and larger dynamic range compared to gap-changed capacitive transducers. Such transducers have been widely applied in rectilinear and rotational position sensors, lab-on-a-chip applications and bio-sensors. However, a complete model accounting for both the parasitic capacitance and fringe ...